ANALYSIS OF ACCELERATING LENS SYSTEM IN FIELD-EMISSION SCANNING ELECTRON-MICROSCOPE

被引：15

作者：

KURODA, K ^{[1
]}

SUZUKI, T ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN,DEPT APPL PHYS,SUITA,OSAKA,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1974年 / 45卷 / 03期

关键词：

D O I：

10.1063/1.1663425

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1436 / 1441

页数：6

共 12 条

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[4]

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Glaser, Walter .

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[6]

GRIVET P, 1965, ELECTRON OPTICS

[7] APERTURE EFFECT OF ELECTROSTATIC LENSES [J].

KURODA, K ;

SUZUKI, T .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1972, 11 (08) :1222-&

[8]

MUNRO E, 1972, 5TH P EUR C EL MICR, P22

[9] EFFICIENT METHOD FOR FINDING MINIMUM OF FUNCTION OF SEVERAL-VARIABLES WITHOUT CALCULATING DERIVATIVES [J].

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[10] Over some errors of electrons lenses. [J].

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