DEPOSITION OF DIAMOND LAYERS BY HOT-FILAMENT ACTIVATED CVD USING ACETONE AS A CARBON SOURCE

被引：5

作者：

OKOLI, S

HAUBNER, R

LUX, B

机构：

来源：

JOURNAL DE PHYSIQUE | 1989年 / 50卷 / C-5期

关键词：

D O I：

10.1051/jphyscol:1989523

中图分类号：

学科分类号：

摘要：

引用

页码：159 / 168

页数：10

共 15 条

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[4]

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[10]

MITSUDA Y, 1988, 1ST INT C NEW DIAM T, V1, P44

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