INFRARED LIGHT-SCATTERING TOMOGRAPHY WITH AN ELECTRICAL STREAK CAMERA FOR CHARACTERIZATION OF SEMICONDUCTOR CRYSTALS

被引：56

作者：

OGAWA, T ^{[1
]}

NANGO, N ^{[1
]}

机构：

[1] RATOC SYSTEM ENGN CO,SHINJUKU KU,TOKYO 160,JAPAN

来源：

关键词：

D O I：

10.1063/1.1138670

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1135 / 1139

页数：5

相关论文

共 3 条

[1] DETECTION OF PLATE-LIKE DEFECTS BY LIGHT-SCATTERING TOMOGRAPHY [J].

MORIYA, K ;

OGAWA, T .

PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1981, 44 (05) :1085-1097

MORIYA, K ;

OGAWA, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (04) :L207-L209

[3]

OGAWA T, 1985, DEFECT RECOGNITION I