DEPTH PROFILING OF HYDROGEN IN THIN-FILMS WITH THE ELASTIC RECOIL DETECTION TECHNIQUE

被引:15
作者
CHENG, HS
ZHOU, ZY
YANG, FC
XU, ZW
REN, YH
机构
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 218卷 / 1-3期
关键词
D O I
10.1016/0167-5087(83)91051-7
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:601 / 606
页数:6
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