EFFICIENT TABULATION OF PLASMA SURFACE INTERACTION DATA

The Maximum Entropy method is applied to characterize distribution functions obtained by Monte Carlo simulations for plasma surface interactions. Examples are depth distributions of implanted projectiles and energy distributions of backscattered and sputtered atoms. It turns out that such plasma relevant distribution functions can be reconstructed efficiently from a few low-order moments of the distribution. The reconstruction of the underlying distribution is accomplished by Maximum Entropy analysis. This procedure allows an efficient tabulation of plasma surface interaction data and a considerable speed-up of the Monte Carlo simulation.