ONSET OF PHOTOCONDUCTION IN HYDROGENATED AMORPHOUS-CARBON FILMS PREPARED BY RF ASYMMETRIC PECVD TECHNIQUE

被引:12
作者
DIXIT, PN
KUMAR, S
SARANGI, D
BHATTACHARYYA, R
机构
[1] Thin Film and Amorphous Materials Group, National Physical Laboratory, New Delhi, 110 012, Dr. K.S., Krishnan Road
关键词
Hydrogenated amorphous carbon films - Plasma enhanced chemical vapor deposition;
D O I
10.1016/0038-1098(94)90034-5
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Hydrogenated amorphous carbon (a-C:H) films grown on glass substrates by asymmetric RF plasma CVD process exhibit onset of photoconduction under certain range of self bias values. Log sigma Vs 10(3)/T studies in these films indicate that twice the activation energy equals optical band gap at high temperature. At intermediate and lower temperatures. the difference of dark and photoactivation energies is congruent-to 0.15 eV. This indicates that the material has well defined trapping centers which are changed in the presence of light in a definite way.
引用
收藏
页码:421 / 423
页数:3
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