EQUI-LATTICE-SPACING MAPPING X-RAY TOPOGRAPHY

被引:27
作者
ISHIKAWA, T [1 ]
KITANO, T [1 ]
MATSUI, J [1 ]
机构
[1] NEC CORP,FUNDAMENTA RES LABS,SEMICOND RES LAB,KAWASAKI,KANAGAWA 213,JAPAN
关键词
D O I
10.1107/S0021889887086503
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
引用
收藏
页码:344 / 348
页数:5
相关论文
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