EARLY STAGES OF OXYGEN SEGREGATION AND PRECIPITATION IN SILICON

被引：198

作者：

BOURRET, A

THIBAULTDESSEAUX, J

SEIDMAN, DN

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 04期

关键词：

D O I：

10.1063/1.333178

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：825 / 836

页数：12

共 42 条

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