PARTICULARITIES OF CRYSTALLINE TO AMORPHOUS STATE CONVERSION IN SILICON HEAVILY DAMAGED BY 140 KEV SI++ IONS

被引:12
作者
GOLANSKI, A
FIDERKIEWICZ, A
RZEWUSKI, H
LEFELDSOSNOWSKA, M
GRONKOWSKI, J
GROTZSCHEL, R
KREISSIG, U
BARTSCH, H
机构
[1] INST NUCL RES,PL-05400 SWIERK,POLAND
[2] UNIV WARSAW,INST EXPTL PHYS,PL-02089 WARSAW,POLAND
[3] DAWB,ZENT INST KERN FORSCH,ROSSENDORF,DEUTSCH DEM REP
[4] DAWB,INST FESTKORPER PHYS & ELEKTRONENMIKROSKOPIE,DDR-401 HALLE,GER DEM REP
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1976年 / 38卷 / 01期
关键词
D O I
10.1002/pssa.2210380116
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:139 / 149
页数:11
相关论文
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