INSITU NANOINDENTATION HARDNESS APPARATUS FOR MECHANICAL CHARACTERIZATION OF EXTREMELY THIN-FILMS

被引：9

作者：

BHUSHAN, B ^{[1
]}

WILLIAMS, VS ^{[1
]}

SHACK, RV ^{[1
]}

机构：

[1] UNIV ARIZONA,CTR OPT SCI,TUCSON,AZ 85721

来源：

JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME | 1988年 / 110卷 / 03期

关键词：

D O I：

10.1115/1.3261685

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

引用

页码：563 / 571

页数：9

共 17 条

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