STRUCTURAL BEHAVIOR OF SPUTTERED W-C-CO COATINGS AT INCREASING TEMPERATURES

被引:4
作者
CAVALEIRO, A
VIEIRA, MT
机构
[1] Departamento de Engenharia Mecânica, Universidade de Coimbra, Coimbra
关键词
D O I
10.1007/BF00365028
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In order to evaluate the thermal resistance of sputtered W-C-Co coatings, a structural study was carried out on amorphous and crystalline coatings according to their cobalt content after having been annealed at increasing temperatures up to 800-degrees-C. All the films were stable up to 700-degrees-C, at which temperature the amorphous films began to crystallize as alpha-W2C; for higher temperatures the alpha-W2C carbide evolves to M6C, the extent of which increases the higher the cobalt content; for low cobalt content films WC carbide was also formed. Crystalline films have similar structural transformations, although the M6C phase is almost non-existent and alpha-W2C and WC can occur with preferential orientations. In all cases, the films after annealing were carbon-deficient in relation to the results obtained for the as-deposited conditions; in spite of the fact that the phases detected after crystallization are also carbon-deficient, these results are not consistent which implies that some free carbon should exist in the annealed films.
引用
收藏
页码:6096 / 6102
页数:7
相关论文
共 18 条
[1]   STRUCTURE AND CHEMICAL-COMPOSITION OF W-C-(CO) SPUTTERED FILMS [J].
CAVALEIRO, A ;
VIEIRA, MT ;
LEMPERIERE, G .
THIN SOLID FILMS, 1991, 197 (1-2) :237-255
[2]   CATALYTIC EFFECT OF COBALT ON THE CARBURIZATION KINETICS OF TUNGSTEN [J].
DAVIDSON, CF ;
ALEXANDER, GB ;
WADSWORTH, ME .
METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1979, 10 (08) :1059-1069
[3]   LOCAL ORDER AND PHYSICAL-PROPERTIES OF IRON-RICH METALLIC GLASSES [J].
DUBOIS, JM ;
LECAER, G .
ACTA METALLURGICA, 1984, 32 (11) :2101-2114
[4]   ATOMIC SIZE EFFECT ON THE FORMABILITY OF METALLIC GLASSES [J].
EGAMI, T ;
WASEDA, Y .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 64 (1-2) :113-134
[5]  
GOLDSCHMIDT HJ, 1948, J IRON STEEL I DEC, P345
[6]   COMPUTATIONAL DESIGN OF WEAR COATINGS [J].
KRAMER, BM ;
JUDD, PK .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2439-2444
[7]   A MODEL FOR DEVELOPMENT OF ORIENTATION OF VAPOR DEPOSITS [J].
LEE, DN .
JOURNAL OF MATERIALS SCIENCE, 1989, 24 (12) :4375-4378
[8]  
LENZ E, 1976, J ENG IND
[9]  
RICKERBY DS, 1988, THIN SOLID FILMS, V157, P155
[10]  
RUDY E, 1967, PLANSEEBER PULVERMET, V15, P174