STRAIN-IMAGING OBSERVATION OF PB(ZR,TI)O-3 THIN-FILMS

被引：16

作者：

TAKATA, K ^{[1
]}

KUSHIDA, K ^{[1
]}

TORII, K ^{[1
]}

机构：

[1] HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO 185,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 5B期

关键词：

PZT; STRAIN IMAGING; PIEZOELECTRIC CONSTANT; ROSETTE STRUCTURE;

D O I：

10.1143/JJAP.34.2890

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper describes Strain-Imaging observation, using a tunneling acoustic microscope, of lead-zirconate-titanate (PZT) thin films. Strain Imaging detects fine strains generated by the tip voltage in piezoelectric films. This method reveals piezoelectric properties nondestructively with high spatial resolution and is suitable for the characterization of PZT materials for microelectric devices. In Pb(Zr0.5Ti0.5)O-3 grown by rf magnetron sputtering, we have observed different properties between round grain structures, so-called ''rosettes'', where PZT crystallines have grown from the same cores. This fact shows that not only grain size but also the size of rosettes and the fluctuation of its composition are important factors in the production of homogeneous PZT films.

引用

页码：2890 / 2894

页数：5

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