EVALUATION OF RESIDUAL DEFORMATIONS GENERATED BY A PULSED ION IMPLANTER USING INTERFEROMETRIC PHASE MEASUREMENT

被引：5

作者：

KAUFMANN, GH

BRUHL, SP

GALIZZI, GE

FEUGEAS, JN

机构：

[1] The authors are in the Instituto de Fisica Rosario (CONICET-UNR) Bv. 27 de Febrero 210 bis

来源：

OPTICS AND LASER TECHNOLOGY | 1995年 / 27卷 / 01期

关键词：

HOLOGRAPHIC INTERFEROMETRY; FRINGE ANALYSIS; RESIDUAL DEFORMATIONS; ION IMPLANTATION;

D O I：

10.1016/0030-3992(95)93960-Y

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A Fourier transform method of holographic fringe pattern analysis is applied to measure surface residual deformations generated by a pulsed ion implanter. The technique uses a fixture that makes it possible to remove the specimen and put it back into the same position after being implanted. The phase information from interferograms extracted by means of the Fourier transform method is unwrapped using an algorithm based on cellular automata. Results computed from the application of a numerical model are compared with those determined experimentally and a reasonable agreement is obtained.

引用

页码：57 / 63

页数：7

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