MODULI DETERMINATION IN POLYIMIDE FILM BILAYER SYSTEMS - PROSPECTS FOR DEPTH PROFILING USING IMPULSIVE STIMULATED THERMAL SCATTERING

被引:15
作者
DHAR, L
ROGERS, JA
NELSON, KA
TRUSELL, F
机构
[1] MIT,DEPT CHEM,CAMBRIDGE,MA 02139
[2] MIT,DEPT ELECT ENGN,CAMBRIDGE,MA 02139
关键词
D O I
10.1063/1.359471
中图分类号
O59 [应用物理学];
学科分类号
摘要
A laser-based ultrasonic technique, impulsive stimulated thermal scattering (ISTS), is used to characterize the acoustic waveguide behavior in a series of silicon-supported and free-standing polyimide bilayer structures. The experimental results demonstrate that multilayer structures are characterizable using ISTS measurements. In addition, simulations of acoustic waveguide behavior in coatings with very thin interfacial layers adjacent to the substrate and in films with continuously changing elastic properties are presented. The results indicate depth-profiling possibilities using ISTS. © 1995 American Institute of Physics.
引用
收藏
页码:4431 / 4444
页数:14
相关论文
共 45 条
[1]  
BARNES JW, 1988, STATISTICAL ANAL ENG
[2]  
BEALE EML, 1960, J ROY STAT SOC B, V22, P41
[3]   SURFACE ACOUSTIC-OSCILLATIONS IN A PERIODICALLY LAYERED MEDIUM [J].
BULGAKOV, AA .
SOLID STATE COMMUNICATIONS, 1985, 55 (10) :869-872
[4]   MODELING OF MULTILEVEL STRUCTURES - A GENERAL-METHOD FOR ANALYZING STRESS EVOLUTION DURING PROCESSING [J].
CIFUENTES, AO ;
SHAREEF, IA .
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1992, 5 (02) :128-137
[5]   STRESS IN POLYIMIDE COATINGS [J].
COBURN, JC ;
POTTIGER, MT ;
NOE, SC ;
SENTURIA, SD .
JOURNAL OF POLYMER SCIENCE PART B-POLYMER PHYSICS, 1994, 32 (07) :1271-1283
[6]   MORPHOLOGY OF THIN POLYIMIDE FILMS [J].
DANEV, G ;
SPASSOVA, E ;
POPOVA, K .
THIN SOLID FILMS, 1993, 228 (1-2) :301-303
[7]   REAL-TIME OPTICAL CHARACTERIZATION OF SURFACE ACOUSTIC MODES OF POLYIMIDE THIN-FILM COATINGS [J].
DUGGAL, AR ;
ROGERS, JA ;
NELSON, KA .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (07) :2823-2839
[8]   REAL-TIME CHARACTERIZATION OF ACOUSTIC MODES OF POLYIMIDE THIN-FILM COATINGS USING IMPULSIVE STIMULATED THERMAL SCATTERING [J].
DUGGAL, AR ;
ROGERS, JA ;
NELSON, KA ;
ROTHSCHILD, M .
APPLIED PHYSICS LETTERS, 1992, 60 (06) :692-694
[9]  
Eichler H. J., 1986, LASER INDUCED DYNAMI
[10]  
Farnell G.W., 1972, PHYS ACOUSTICS, V9, P35, DOI DOI 10.1016/B978-0-12-395670-5.50007-6