MOIRE TOPOGRAPHY FOR 3-DIMENSIONAL PROFILE MEASUREMENT USING THE INTERFERENCE-FRINGES OF A LASER

被引：6

作者：

MATSUMOTO, T

KITAGAWA, Y

ADACHI, M

HAYASHI, A

机构：

[1] KANAZAWA UNIV,FAC ENGN,KANAZAWA,ISHIKAWA 920,JAPAN

[2] KOBE CITY COLL TECHNOL,DEPT ELECTR,KOBE 65121,JAPAN

来源：

OPTICAL ENGINEERING | 1992年 / 31卷 / 12期

关键词：

MOIRE TOPOGRAPHY; INTERFERENCE FRINGES; MACH-ZEHNDER INTERFEROMETERS; PROFILE MEASUREMENTS;

D O I：

10.1117/12.60019

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Resolution-variable moire topography for measuring the three-dimensional profile of an object is described. With this method, moire fringes are formed by projecting two sets of interference fringes of laser beams on an object. The interference fringes are formed using a Mach-Zehnder interferometer and are divided into two sets by a beamsplitter. The image, including the moire fringes, which are formed in accordance with the object depth, is detected by an image sensor. The effectiveness of this method is demonstrated by practically measuring the profiles of a small object. The intervals between adjacent moire fringes could be experimentally changed from 0.16 to 1.6 mm. The advantage of this method is that the interval between moire fringes can be easily changed continuously by a mechanical operation.

引用

页码：2668 / 2673

页数：6

共 14 条

[1]

Blatt Joel H., 1990, Journal of Laser Applications, V2, P35, DOI 10.2351/1.4745266

[2] GENERATION OF MOIRE CONTOURS WITH ACOUSTOOPTIC CELLS [J].