THICKNESS MEASUREMENTS OF THIN PERMALLOY FILMS - COMPARISON OF X-RAY EMISSION SPECTROSCOPY INTERFEROMETRY AND STYLUS METHODS

被引：8

作者：

SILVER, MD

CHOW, ETK

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1965年 / 2卷 / 04期

关键词：

D O I：

10.1116/1.1492425

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：203 / &

共 12 条

[1]

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[2]

CHOW ETK, 1965, MAR PITTSB C AN CHEM

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DYSON, J .

PHYSICA, 1958, 24 (06) :532-537

[4]

LIEBHOFSKY HA, 1960, XRAY ABSORPTION EMIS

[5]

LLOYD JC, TR22090 COMP DIV IBM

[6]

MOHRNHEIM AF, 1963, PLATING, V50, P725

[7] CHEMICAL ANALYSIS OF THIN FILMS BY X-RAY EMISSION SPECTROGRAPHY [J].

RHODIN, TN .

[8]

SCHWARTZ N, 1961, 2 P INT VAC C WASH

[9]

STONE RR, 1963, 10 NOR REPTR, P94

[10]

Tolansky S., 1948, MULTIPLE BEAM INTERF