EXAMINATION OF TELLURIUM ION-IMPLANTED GAAS BY TRANSMISSION ELECTRON-MICROSCOPY

被引:19
作者
SEALY, BJ [1 ]
机构
[1] UNIV SURREY,DEPT PHYS,GUILDFORD,SURREY,ENGLAND
关键词
D O I
10.1007/BF00566577
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:683 / 691
页数:9
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