THERMAL-STABILITY OF BENZOTRIAZOLE ON COPPER DURING ATMOSPHERIC CORROSION

被引:32
作者
CHRISTENSEN, TM [1 ]
SORENSEN, NR [1 ]
机构
[1] SANDIA NATL LABS,DIV 1834,ALBUQUERQUE,NM 87185
关键词
D O I
10.1002/sia.740170104
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Atmospheric corrosion of copper can result in substantial problems for electrical interconnection in microelectronic applications. We have used x-ray photoelectron spectroscopy (XPS) to examine the effects of benzotriazole (BTA), an organic corrosion inhibitor, on atmospheric oxidation and sulfidation of polycrystalline copper in the temperature range 30-200-degrees-C. XPS results demonstrated that BTA was removed from the copper surface at some temperature below 200-degrees-C in most environments. The temperature at which BTA was lost depended on the ambient composition. BTA was least stable in sulfur-containing environments, disappearing from the surface even at room temperatures. In oxygen-containing environments, BTA was quickly lost from the surface at temperatures above 150-degrees-C. BTA was quite stable in pure nitrogen and in a vacuum up to temperatures near 200-degrees-C. This suggests that the loss mechanism involved a chemical reaction rather than solely a thermal process. The BTA-Cu(II) complex existing at room temperature was irreversibly converted into a BTA-Cu(I) complex upon heating above 90-degrees-C in a vacuum.
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页码:3 / 6
页数:4
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