TIME-RESOLVED DIAGNOSIS OF PROCESSES IN PLD OF CERAMICS

被引：9

作者：

VOSS, A

KREUTZ, EW

FUNKEN, J

ALUNOVIC, M

SUNG, H

机构：

[1] D-5100 Aachen

来源：

APPLIED SURFACE SCIENCE | 1993年 / 69卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(93)90500-B

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The material transfer of ceramics (Al2O3, ZrO2) in pulsed laser deposition (PLD) is studied as a function of pulsed CO2 laser radiation parameters and processing variables. Time-resolved measurements of the composition and the electron-temperature as well as the geometry and dynamics of the vapour/plasma were obtained by emission spectroscopy and high-speed photography. The vapour/plasma states are related to the structures of ceramic films grown on metallic substrates.

引用

页码：174 / 179

页数：6

共 18 条

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