DEPOSITION AND CHARACTERIZATION OF TERNARY NITRIDES

被引：68

作者：

RANDHAWA, H

JOHNSON, PC

CUNNINGHAM, R

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.575204

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2136 / 2139

页数：4

共 6 条

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RISTOLAINEN, EO .

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[3]

MUNZ WD, 1986, J VAC SCI TECHNOL A, V4, P2717, DOI 10.1116/1.573713

[4] TIN-COATED HIGH-SPEED STEEL CUTTING TOOLS [J].

RANDHAWA, H .

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[5]

RANDHAWA H, 1987, SURF COATINGS TECHNO, V31, P1303

[6]

Sproul W. D., 1986, AIP C P, V149, P157