ARAMIS - AN AMBIDEXTROUS-2 MV ACCELERATOR FOR IBA AND MEV IMPLANTATION

被引:99
作者
COTTEREAU, E
CAMPLAN, J
CHAUMONT, J
MEUNIER, R
BERNAS, H
机构
[1] CSNSM, F-91405 Orsay Campus
关键词
D O I
10.1016/0168-583X(90)90838-L
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We will present the 2 MV accelerator that we built at our laboratory. ARAMIS is a tandem accelerator with a positive-ion source in the high-voltage terminal so that it can be operated both in the tandem and in the single-ended mode. Tuning from one mode to the other is quite easy so that the implantation or irradiation of samples can be followed periodically with RBS. We show some results. © 1990.
引用
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页码:293 / 295
页数:3
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