OPTICAL BENDS AND RINGS FABRICATED BY PREFERENTIAL ETCHING

被引：17

作者：

TSENG, CC

BOTEZ, D

WANG, S

机构：

[1] UNIV CALIF,DEPT ELECT ENGN & COMP SCI,BERKELEY,CA 94720

[2] UNIV CALIF,ELECTR RES LAB,BERKELEY,CA

来源：

APPLIED PHYSICS LETTERS | 1975年 / 26卷 / 12期

关键词：

D O I：

10.1063/1.88041

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：699 / 701

页数：3

共 11 条

[1] ELECTRON-RESIST FABRICATION OF BENDS AND COUPLERS FOR INTEGRATED OPTICAL CIRCUITS [J].

GOELL, JE .

APPLIED OPTICS, 1973, 12 (04) :729-736

[2] ANISOTROPIC ETCHING OF SILICON [J].

LEE, DB .

JOURNAL OF APPLIED PHYSICS, 1969, 40 (11) :4569-&

[3] MODE CONVERSION CAUSED BY SURFACE IMPERFECTIONS OF A DIELECTRIC SLAB WAVEGUIDE [J].

MARCUSE, D .

BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (10) :3187-+

[4] INTEGRATED OPTICS - AN INTRODUCTION [J].

MILLER, SE .

BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (07) :2059-+

[5]

RICKER T, 1974, SOLID STATE TECHNOL, V17, P69

[6] FABRICATION TECHNIQUES FOR SURFACE-ACOUSTIC-WAVE AND THIN-FILM OPTICAL DEVICES [J].

SMITH, HI .

PROCEEDINGS OF THE IEEE, 1974, 62 (10) :1361-1387

[7] CHANNEL OPTICAL WAVEGUIDE DIRECTIONAL COUPLERS [J].

SOMEKH, S ;

GARMIRE, E ;

YARIV, A ;

GARVIN, HL ;

HUNSPERGER, RG .

APPLIED PHYSICS LETTERS, 1973, 22 (01) :46-47

[8]

TSANG W, TO BE PUBLISHED

[9] UNIDIRECTIONAL THIN-FILM RING LASER [J].

ULRICH, R ;

WEBER, HP .

APPLIED PHYSICS LETTERS, 1972, 20 (01) :38-&

[10]

WAGGENER HA, 1967, ELECTRONICS, V40, P274

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