DETECTION LIMITS IN QUANTITATIVE OFF-AXIS ELECTRON HOLOGRAPHY

被引:83
作者
DERUIJTER, WJ [1 ]
WEISS, JK [1 ]
机构
[1] ARIZONA STATE UNIV, CTR SOLID STATE SCI, TEMPE, AZ 85287 USA
基金
美国国家科学基金会;
关键词
D O I
10.1016/0304-3991(93)90196-5
中图分类号
TH742 [显微镜];
学科分类号
摘要
The phase of an electron wave is altered by electric and magnetic fields as it passes through a specimen. This phase change can be accurately quantified from off-axis electron holograms acquired using a slow-scan CCD camera, and small changes can be observed over small dimensions. Expressions for the precision of the phase estimate, which is limited by shot noise, have been developed. These include most of the real experimental parameters. It is found that the typical precision of practical phase measurements is better than pi/100 for spatial resolutions of 1-3 nm, in good agreement with the theoretical optimal phase precision. In order to attain such small errors the effects of geometric distortion, which can introduce phase differences of up to pi, must be carefully corrected.
引用
收藏
页码:269 / 283
页数:15
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