LOW-LOSS PECVD SILICA CHANNEL WAVE-GUIDES FOR OPTICAL COMMUNICATIONS

被引：60

作者：

GRAND, G

JADOT, JP

DENIS, H

VALETTE, S

FOURNIER, A

GROUILLET, AM

机构：

[1] LETI, CEA-CENG, Grenoble Cedex, BP 85 X

来源：

ELECTRONICS LETTERS | 1990年 / 26卷 / 25期

关键词：

Optical communication; Waveguides;

D O I：

10.1049/el:19901375

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports reproducible measurements of propagation losses in channel waveguides fabricated on silicon substrate by PECVD. The average value obtained from more than 50 different channel guides is 0.1 dB/cm at 1.55μm. The behaviour with wavelength is also presented and discussed. © 1990, The Institution of Electrical Engineers. All rights reserved.

引用

页码：2135 / 2137

页数：3

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VALETTE S, 1989, SOLID STATE TECH FEB, P69

[9] INTEGRATED 4-CHANNEL MACH-ZEHNDER MULTI DEMULTIPLEXER FABRICATED WITH PHOSPHORUS DOPED SIO2 WAVE-GUIDES ON SI [J].

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JOURNAL OF LIGHTWAVE TECHNOLOGY, 1988, 6 (06) :1011-1015

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