HIGHLY RELIABLE HIGH-VOLTAGE TRANSISTORS BY USE OF SIPOS PROCESS

被引:96
作者
MATSUSHITA, T [1 ]
AOKI, T [1 ]
OHTSU, T [1 ]
YAMOTO, H [1 ]
HAYASHI, H [1 ]
OKAYAMA, M [1 ]
KAWANA, Y [1 ]
机构
[1] SONY CORP,ATSUGI PLANT,ATSUGI 243,JAPAN
关键词
D O I
10.1109/T-ED.1976.18494
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:826 / 830
页数:5
相关论文
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