EFFECT OF EASILY IONIZED ELEMENTS UPON THE SPATIAL EMISSION PROPERTIES OF MICROWAVE-INDUCED PLASMAS

被引:27
作者
SELBY, M [1 ]
REZAAIYAAN, R [1 ]
HIEFTJE, GM [1 ]
机构
[1] INDIANA UNIV,DEPT CHEM,BLOOMINGTON,IN 47405
关键词
D O I
10.1366/0003702874448328
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:761 / 771
页数:11
相关论文
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