A FAST METHOD FOR THE SIMULATION OF XPS AND AES SPECTRA

被引：10

作者：

ALKEMADE, PFA ^{[1
]}

WERNER, K ^{[1
]}

RADELAAR, S ^{[1
]}

SLOOF, WG ^{[1
]}

机构：

[1] DELFT UNIV TECHNOL,MAT SCI LAB,2628 AL DELFT,NETHERLANDS

来源：

APPLIED SURFACE SCIENCE | 1993年 / 70-1卷

关键词：

D O I：

10.1016/0169-4332(93)90391-N

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Results of Monte Carlo simulation are often applied for quantitative XPS or AES analysis. In this work we show that for almost homogeneous samples, translations and rotations of (Monte Carlo) simulated electron trajectories lead to a substantial reduction in computation time. The method is applied to angle-resolved XPS measurements. It is shown that the distribution of a low-concentration element in the outermost 50 angstrom of a solid can be measured quantitatively.

引用

页码：24 / 28

页数：5

共 16 条

[1] THE TRANSPORT OF KEV ENERGY ELECTRONS IN SI STUDIED BY ION-INDUCED AUGER EXCITATION IN COMBINATION WITH CHANNELING
ALKEMADE, PFA
LENNARD, WN
MITCHELL, IV
[J]. SURFACE SCIENCE, 1991, 248 (1-2) : 173 - 182
[2] ALKEMADE PFA, 1991, INTERACTION CHARGED, P599
[3] ALKEMADE PFA, IN PRESS
[4] METHODS OF ELECTRON-SPECTRA PROCESSING BASED ON SOLVING THE TRANSPORT-EQUATION OF ELECTRON MOTION IN A SOLID
BORODYANSKY, S
[J]. SURFACE AND INTERFACE ANALYSIS, 1992, 19 (1-12) : 181 - 186
[5] THE DEPTH DISTRIBUTION FUNCTION IN AUGER XPS ANALYSIS
DWYER, VM
RICHARDS, JM
[J]. SURFACE AND INTERFACE ANALYSIS, 1992, 18 (07) : 555 - 560
[6] Gregory D., 1974, Atomic Data and Nuclear Data Tables, V14, P39, DOI 10.1016/S0092-640X(74)80029-X
[7] QUANTITATIVE AES - VIA THE INELASTIC MEAN FREE-PATH OR THE ATTENUATION LENGTH
JABLONSKI, A
[J]. SURFACE AND INTERFACE ANALYSIS, 1990, 15 (09) : 559 - 566
[8] Riley M. E., 1975, Atomic Data and Nuclear Data Tables, V15, P443, DOI 10.1016/0092-640X(75)90012-1
[9] ESCAPE PROBABILITY OF AUGER ELECTRONS FROM NONCRYSTALLINE SOLIDS - EXACT SOLUTION IN THE TRANSPORT APPROXIMATION
TILININ, IS
WERNER, WSM
[J]. PHYSICAL REVIEW B, 1992, 46 (21): : 13739 - 13746
[10] QUANTITATIVE-ANALYSIS OF THE INELASTIC BACKGROUND IN SURFACE ELECTRON-SPECTROSCOPY
TOUGAARD, S
[J]. SURFACE AND INTERFACE ANALYSIS, 1988, 11 (09) : 453 - 472

← 1 2 →