SPATIAL-DISTRIBUTION OF SPUTTERED PARTICLES FROM POLYCRYSTALS UNDER ION-BOMBARDMENT

被引：9

作者：

DODONOV, AI

FEDOROVICH, SD

KRYLOVA, EA

MASHKOVA, ES

MOLCHANOV, VA

机构：

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1988年 / 107卷 / 01期

关键词：

D O I：

10.1080/00337578808225716

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

引用

页码：15 / 21

页数：7

共 10 条

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ECKSTEIN, W ;

ROTH, J .

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[2]

Behrisch R., 1981, SPUTTERING PARTICLE, V1

[3]

BETZ G, 1987, NUCL INSTR METH PH B, V18

[4] SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP [J].

BIERSACK, JP ;

ECKSTEIN, W .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02) :73-94

[5]

DODONOV AI, 1986, POVERKHNOST, P33

[6]

Mashkova E.S., 1985, MEDIUM ENERGY ION RE

[7] ON THE ENERGY-DISTRIBUTION AND ANGULAR-DISTRIBUTION OF SPUTTERED PARTICLES [J].

ROOSENDAAL, HE ;

SANDERS, JB .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 52 (3-4) :137-143

[8]

ROTH J, 1980, P S SPUTTERING, P773

[9]

SHULGA VI, 1984, RAD EFF, V82, P69

[10]

SHULTZ F, 1969, PHILOS MAGAZINE, V18, P23

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