SILICON-ON-INSULATOR BY GRAPHOEPITAXY AND ZONE-MELTING RECRYSTALLIZATION OF PATTERNED FILMS

被引：73

作者：

SMITH, HI ^{[1
]}

GEIS, MW ^{[1
]}

THOMPSON, CV ^{[1
]}

ATWATER, HA ^{[1
]}

机构：

[1] MIT,LINCOLN LAB,LEXINGTON,MA 02173

来源：

JOURNAL OF CRYSTAL GROWTH | 1983年 / 63卷 / 03期

关键词：

D O I：

10.1016/0022-0248(83)90165-3

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

收藏

页码：527 / 546

页数：20

相关论文

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