EVALUATION OF SI THIN-FILMS BY PHOTOTHERMAL DEFLECTION SPECTROSCOPY (PDS)

被引：9

作者：

HATA, T

HATSUDA, T

KOMATSU, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 11期

关键词：

D O I：

10.1143/JJAP.24.1463

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1463 / 1466

页数：4

共 13 条

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[6]

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[7] DIRECT MEASUREMENT OF GAP-STATE ABSORPTION IN HYDROGENATED AMORPHOUS-SILICON BY PHOTOTHERMAL DEFLECTION SPECTROSCOPY [J].

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JOURNAL OF APPLIED PHYSICS, 1983, 54 (06) :3404-3409

[10] PHOTOTHERMAL SPECTROSCOPY USING OPTICAL BEAM PROBING - MIRAGE EFFECT [J].

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