APPLICABILITY OF THE CLASSICAL CURVATURE-STRESS RELATION FOR THIN-FILMS ON PLATE SUBSTRATES

被引:96
作者
VONPREISSIG, FJ
机构
关键词
D O I
10.1063/1.343968
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:4262 / 4268
页数:7
相关论文
共 16 条
[1]  
BORESI P, 1987, ELASTICITY ENG MECHA, P318
[2]   CALCULATED ELASTIC-CONSTANTS FOR STRESS PROBLEMS ASSOCIATED WITH SEMICONDUCTOR DEVICES [J].
BRANTLEY, WA .
JOURNAL OF APPLIED PHYSICS, 1973, 44 (01) :534-535
[3]  
DAVIDENKOV NN, 1961, FIZ TVERD TELA, V2, P2595
[4]   MEASUREMENT AND INTERPRETATION OF STRESS IN ALUMINUM-BASED METALLIZATION AS A FUNCTION OF THERMAL HISTORY [J].
FLINN, PA ;
GARDNER, DS ;
NIX, WD .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (03) :689-699
[5]  
HEARMON RFS, 1961, INTRO APPLIED ANISOT, pCH1
[6]  
Hoffman R. W., 1966, PHYS THIN FILMS, VVol. 3, pp. 211
[7]  
LEKHNITSKII SG, 1963, THEORY ELASTICITY AN, pCH3
[8]  
MURAVEVA TD, 1982, VYSOKOMOL SOEDIN B, V24, P163
[9]  
Nye J. F., 1985, PHYS PROPERTIES CRYS, P131