CHEMICAL VAPOR-DEPOSITION OF METAL SILICIDES FROM ORGANOMETALLIC COMPOUNDS WITH SILICON METAL BONDS

被引：35

作者：

AYLETT, BJ

TANNAHILL, AA

机构：

来源：

VACUUM | 1985年 / 35卷 / 10-1期

关键词：

D O I：

10.1016/0042-207X(85)90362-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：435 / 439

页数：5

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