GROWTH AND STRUCTURE OF TITANIUM SILICIDE PHASES FORMED BY THIN TI FILMS ON SI CRYSTALS

被引：61

作者：

BENTINI, GG

NIPOTI, R

ARMIGLIATO, A

BERTI, M

DRIGO, AV

COHEN, C

机构：

[1] UNIV PADOVA,CNR,GNSM,DIPARTIMENTO FIS,I-35131 PADOVA,ITALY

[2] UNIV PARIS 07,ECOLE NORMALE SUPER PHYS SOLIDES GRP,F-75251 PARIS 05,FRANCE

来源：

关键词：

D O I：

10.1063/1.334799

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：270 / 275

页数：6

共 12 条

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