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ELECTRON IMAGE PROJECTOR WITH AUTOMATIC ALIGNMENT
被引:27
作者
:
SCOTT, JP
论文数:
0
引用数:
0
h-index:
0
机构:
MULLARD RES LABS,REDHILL,SURREY,ENGLAND
MULLARD RES LABS,REDHILL,SURREY,ENGLAND
SCOTT, JP
[
1
]
机构
:
[1]
MULLARD RES LABS,REDHILL,SURREY,ENGLAND
来源
:
IEEE TRANSACTIONS ON ELECTRON DEVICES
|
1975年
/ ED22卷
/ 07期
关键词
:
D O I
:
10.1109/T-ED.1975.18152
中图分类号
:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号
:
0808 ;
0809 ;
摘要
:
引用
收藏
页码:409 / 413
页数:5
相关论文
共 5 条
[1]
FAY B, 1971, 3RD INT COLL
[2]
AN ELECTRON IMAGING SYSTEM FOR FABRICATION OF INTEGRATED CIRCUITS
[J].
OKEEFFE, TW
论文数:
0
引用数:
0
h-index:
0
机构:
Westinghouse Research Laboratories, Pittsburgh
OKEEFFE, TW
;
VINE, J
论文数:
0
引用数:
0
h-index:
0
机构:
Westinghouse Research Laboratories, Pittsburgh
VINE, J
;
HANDY, RM
论文数:
0
引用数:
0
h-index:
0
机构:
Westinghouse Research Laboratories, Pittsburgh
HANDY, RM
.
SOLID-STATE ELECTRONICS,
1969,
12
(11)
:841
-&
[3]
PHOTOCATHODES FOR USE IN AN ELECTRON IMAGE PROJECTOR
[J].
SCOTT, JP
论文数:
0
引用数:
0
h-index:
0
机构:
MULLARD RES LABS,REDHILL,SURREY,ENGLAND
MULLARD RES LABS,REDHILL,SURREY,ENGLAND
SCOTT, JP
.
JOURNAL OF APPLIED PHYSICS,
1975,
46
(02)
:661
-664
[4]
SCOTT JP, 1974, 6TH P INT C EL ION B
[5]
ELECTROSTATIC WAFER CHUCK FOR ELECTRON-BEAM MICROFABRICATION
[J].
WARDLY, GA
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
WARDLY, GA
.
REVIEW OF SCIENTIFIC INSTRUMENTS,
1973,
44
(10)
:1506
-1509
←
1
→
共 5 条
[1]
FAY B, 1971, 3RD INT COLL
[2]
AN ELECTRON IMAGING SYSTEM FOR FABRICATION OF INTEGRATED CIRCUITS
[J].
OKEEFFE, TW
论文数:
0
引用数:
0
h-index:
0
机构:
Westinghouse Research Laboratories, Pittsburgh
OKEEFFE, TW
;
VINE, J
论文数:
0
引用数:
0
h-index:
0
机构:
Westinghouse Research Laboratories, Pittsburgh
VINE, J
;
HANDY, RM
论文数:
0
引用数:
0
h-index:
0
机构:
Westinghouse Research Laboratories, Pittsburgh
HANDY, RM
.
SOLID-STATE ELECTRONICS,
1969,
12
(11)
:841
-&
[3]
PHOTOCATHODES FOR USE IN AN ELECTRON IMAGE PROJECTOR
[J].
SCOTT, JP
论文数:
0
引用数:
0
h-index:
0
机构:
MULLARD RES LABS,REDHILL,SURREY,ENGLAND
MULLARD RES LABS,REDHILL,SURREY,ENGLAND
SCOTT, JP
.
JOURNAL OF APPLIED PHYSICS,
1975,
46
(02)
:661
-664
[4]
SCOTT JP, 1974, 6TH P INT C EL ION B
[5]
ELECTROSTATIC WAFER CHUCK FOR ELECTRON-BEAM MICROFABRICATION
[J].
WARDLY, GA
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
WARDLY, GA
.
REVIEW OF SCIENTIFIC INSTRUMENTS,
1973,
44
(10)
:1506
-1509
←
1
→