ELECTRON IMAGE PROJECTOR WITH AUTOMATIC ALIGNMENT

被引:27
作者
SCOTT, JP [1 ]
机构
[1] MULLARD RES LABS,REDHILL,SURREY,ENGLAND
关键词
D O I
10.1109/T-ED.1975.18152
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:409 / 413
页数:5
相关论文
共 5 条
[1]  
FAY B, 1971, 3RD INT COLL
[2]   AN ELECTRON IMAGING SYSTEM FOR FABRICATION OF INTEGRATED CIRCUITS [J].
OKEEFFE, TW ;
VINE, J ;
HANDY, RM .
SOLID-STATE ELECTRONICS, 1969, 12 (11) :841-&
[3]   PHOTOCATHODES FOR USE IN AN ELECTRON IMAGE PROJECTOR [J].
SCOTT, JP .
JOURNAL OF APPLIED PHYSICS, 1975, 46 (02) :661-664
[4]  
SCOTT JP, 1974, 6TH P INT C EL ION B
[5]   ELECTROSTATIC WAFER CHUCK FOR ELECTRON-BEAM MICROFABRICATION [J].
WARDLY, GA .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (10) :1506-1509