CRYSTALLOGRAPHIC ORIENTATION AND SURFACE-MORPHOLOGY OF CHEMICAL VAPOR-DEPOSITED AL2O3

被引:35
作者
PARK, CS
KIM, JG
CHUN, JS
机构
关键词
D O I
10.1149/1.2120043
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:1607 / 1611
页数:5
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