LINE-OF-SIGHT MASS-SPECTROMETRY OF INTERACTIONS BETWEEN TANTALUM PENTACHLORIDE WITH TANTALUM AT HIGH-TEMPERATURE AND UNDER LOW-PRESSURE

被引：12

作者：

CARADEC, JY ^{[1
]}

PHILIPPART, JL ^{[1
]}

WEBER, B ^{[1
]}

CASSUTO, A ^{[1
]}

机构：

[1] CTR CINETIQUE PHYS & CHIM,ROUTE VANDOEUVRE,54600 VILLERS NANCY,FRANCE

来源：

SURFACE SCIENCE | 1976年 / 54卷 / 03期

关键词：

D O I：

10.1016/0039-6028(76)90207-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：593 / 600

页数：8

相关论文

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[5] EPITAXIAL-GROWTH OF TANTALUM DEPOSITS TANTALUM SURFACE DURING THERMAL-DECOMPOSITION OF GASEOUS CHLORIDE
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[8] INTERACTIONS OF CHLORINE UNDER LOW-PRESSURE WITH TANTALUM AT HIGH-TEMPERATURE
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