ELECTRON BEAM FABRICATION OF SMALL GEOMETRY TRANSISTORS

[1] MATTA RK, 1965, SPR ECS M

[2] THORNHILL JW, 1965, MICROELECTRON RELIAB, V4, P97

[3] AUTOMATIC POSITIONING OF DEVICE ELECTRODES USING SCANNING ELECTRON MICROSCOPE [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1965, ED12 (10) : 556 - &

[1] MATTA RK, 1965, SPR ECS M

[2] THORNHILL JW, 1965, MICROELECTRON RELIAB, V4, P97

[3] AUTOMATIC POSITIONING OF DEVICE ELECTRODES USING SCANNING ELECTRON MICROSCOPE [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1965, ED12 (10) : 556 - &