共 6 条
[1]
LEUNG W, 1985, APPL PHYS LETT, V46, P1
[2]
Stark J.P., 1976, SOLID STATE DIFFUSIO
[3]
SUB-MICRON OPTICAL LITHOGRAPHY USING AN INORGANIC RESIST-POLYMER BILEVEL SCHEME
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1980, 17 (05)
:1169-1176
[4]
BILEVEL HIGH-RESOLUTION PHOTOLITHOGRAPHIC TECHNIQUE FOR USE WITH WAFERS WITH STEPPED AND-OR REFLECTING SURFACES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1979, 16 (06)
:1977-1979
[5]
TAI KL, 1982, P SOC PHOTO-OPT INST, V333, P32, DOI 10.1117/12.933409
[6]
WAGNER A, 1982, P ELECTROCHEM SOC B, V2, P281