BILEVEL HIGH-RESOLUTION PHOTOLITHOGRAPHIC TECHNIQUE FOR USE WITH WAFERS WITH STEPPED AND-OR REFLECTING SURFACES

被引:107
作者
TAI, KL [1 ]
SINCLAIR, WR [1 ]
VADIMSKY, RG [1 ]
MORAN, JM [1 ]
RAND, MJ [1 ]
机构
[1] BELL TEL LABS INC,ALLENTOWN,PA 18103
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期
关键词
D O I
10.1116/1.570370
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1977 / 1979
页数:3
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