PHOTOLUMINESCENCE OF POROUS SI, OXIDIZED THEN DEOXIDIZED CHEMICALLY

被引:101
作者
NAKAJIMA, A
ITAKURA, T
WATANABE, S
NAKAYAMA, N
机构
[1] Fujitsu Laboratories Ltd., Atsugi-shi, Kanagawa-ken 243-01
关键词
D O I
10.1063/1.107663
中图分类号
O59 [应用物理学];
学科分类号
摘要
We examined the change in photoluminescence spectra of porous Si when it is oxidized then deoxidized chemically. After both steps, photoluminescence shifted to higher frequencies and increased in intensity. These shifts to higher frequencies indicate the photoluminescence is a result of the quantum size effect. Moreover, the increase in photoluminescence intensity after oxidation suggests that termination by hydrogen on the porous Si surface does not always play a key role in the photoluminescence mechanism.
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页码:46 / 48
页数:3
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