CHARACTERIZATION OF HIGH-QUALITY C-AXIS ORIENTED ZNO THIN-FILMS GROWN BY METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION USING ZINC ACETATE AS SOURCE MATERIAL

被引：95

作者：

KIM, JS ^{[1
]}

MARZOUK, HA ^{[1
]}

REUCROFT, PJ ^{[1
]}

HAMRIN, CE ^{[1
]}

机构：

[1] UNIV KENTUCKY,DEPT CHEM ENGN,LEXINGTON,KY 40506

来源：

THIN SOLID FILMS | 1992年 / 217卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(92)90619-M

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

High quality c axis oriented zinc oxide (ZnO) thin films have been deposited on glass substrates by low pressure, metal organic chemical vapor deposition, using zinc acetate (Zn(CH3COO)2) and H2O as source materials. Films have been characterized using X-ray diffraction, X-ray photoelectron spectroscopy, and Auger electron spectroscopy.

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页码：133 / 137

页数：5

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