MODIFICATION OF AL/GAAS(001) SCHOTTKY BARRIERS BY MEANS OF HETEROVALENT INTERFACE LAYERS

被引:21
作者
CANTILE, M
SORBA, L
FARACI, P
YILDIRIM, S
BIASIOL, G
BRATINA, G
FRANCIOSI, A
MILLER, TJ
NATHAN, MI
TAPFER, L
机构
[1] CONSORZIO INTERUNIV FIS MAT,TECNOL AVANZATE SUPERFICI & CATALISI LAB,AREA RIC TRIESTE,I-34012 TRIESTE,ITALY
[2] UNIV MINNESOTA,DEPT CHEM ENGN & MAT SCI,MINNEAPOLIS,MN 55455
[3] UNIV MINNESOTA,DEPT ELECT ENGN,MINNEAPOLIS,MN 55455
[4] CTR NAZL RIC & SVILUPPO MAT,BRINDISI,ITALY
[5] CNR,ICMAT,MONTELBRETTI,ITALY
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 04期
关键词
D O I
10.1116/1.587226
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The Schottky barrier height in Al/Si/Ga-As(001) junctions grown by molecular-beam epitaxy was determined in situ by means of x-ray photoemission spectroscopy and ex situ through current-voltage and capacitance-voltage measurements. We found that the barrier height can be tuned from a minimum value of 0.2 eV to a maximum of 1.1 eV provided that a sufficiently high As or Al flux is employed during the growth of the Si interface layer. The minimum and maximum values of the barrier are already established for Si layer thicknesses in the 1-2 monolayer range. We propose that the changes in barrier height derive from the establishment of a Si-induced local interface dipole. The magnitude and orientation of the dipole reflects the detail of the atomic reconstruction achieved at the interface in the different growth conditions.
引用
收藏
页码:2653 / 2659
页数:7
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