NEAR-SURFACE DAMAGE AND CONTAMINATION AFTER CF4-H2 REACTIVE ION ETCHING OF SI

[1] MONTE CARLO CHANNELING CALCULATIONS [J]. PHYSICAL REVIEW B, 1971, 3 (05): : 1527 - &

[2] BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556

[3] CHANG JS, 1983, ELECTROCHEMICAL SOC, P114

[4] DISTRIBUTION OF IRRADIATION DAMAGE IN SILICON BOMBARDED WITH HYDROGEN [J]. PHYSICAL REVIEW B, 1977, 16 (09) : 3851 - 3859

[5] Chu WK., 1978, BACKSCATTERING SPECT

[6] STRUCTURE, BONDING, AND REACTIVITY OF POLYMER SURFACES STUDIED BY MEANS OF ESCA [J]. CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1978, 8 (01): : 1 - 51

[7] PLASMA-ETCHING - DISCUSSION OF MECHANISMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 391 - 403

[8] PLASMA-ASSISTED ETCHING IN MICROFABRICATION [J]. ANNUAL REVIEW OF MATERIALS SCIENCE, 1983, 13 : 91 - 116

[9] COBURN JW, 1982, AM VACUUM SOC MONOGR, P42

[10] Crank J, 1975, WSEAS T SYST CONTROL

[1] MONTE CARLO CHANNELING CALCULATIONS [J]. PHYSICAL REVIEW B, 1971, 3 (05): : 1527 - &

[2] BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556

[3] CHANG JS, 1983, ELECTROCHEMICAL SOC, P114

[4] DISTRIBUTION OF IRRADIATION DAMAGE IN SILICON BOMBARDED WITH HYDROGEN [J]. PHYSICAL REVIEW B, 1977, 16 (09) : 3851 - 3859

[5] Chu WK., 1978, BACKSCATTERING SPECT

[6] STRUCTURE, BONDING, AND REACTIVITY OF POLYMER SURFACES STUDIED BY MEANS OF ESCA [J]. CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1978, 8 (01): : 1 - 51

[7] PLASMA-ETCHING - DISCUSSION OF MECHANISMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 391 - 403

[8] PLASMA-ASSISTED ETCHING IN MICROFABRICATION [J]. ANNUAL REVIEW OF MATERIALS SCIENCE, 1983, 13 : 91 - 116

[9] COBURN JW, 1982, AM VACUUM SOC MONOGR, P42

[10] Crank J, 1975, WSEAS T SYST CONTROL