DISTRIBUTION OF IRRADIATION DAMAGE IN SILICON BOMBARDED WITH HYDROGEN

被引：68

作者：

CHU, WK ^{[1
]}

KASTL, RH ^{[1
]}

LEVER, RF ^{[1
]}

MADER, S ^{[1
]}

MASTERS, BJ ^{[1
]}

机构：

[1] IBM CORP, DIV SYST PROD, HOPEWELL JUNCTION, NY 12533 USA

来源：

PHYSICAL REVIEW B | 1977年 / 16卷 / 09期

关键词：

D O I：

10.1103/PhysRevB.16.3851

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：3851 / 3859

页数：9

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