PROPERTIES OF ION PLATED OXIDE-FILMS

被引:23
作者
PULKER, HK
HAAG, W
BUHLER, M
MOLL, E
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 06期
关键词
D O I
10.1116/1.572819
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:2700 / 2701
页数:2
相关论文
共 9 条
  • [1] ADHESION AND HARDNESS OF ION-PLATED TIC AND TIN COATINGS
    HUMMER, E
    PERRY, AJ
    [J]. THIN SOLID FILMS, 1983, 101 (03) : 243 - 251
  • [2] LAENG P, 1982, OBERFLACHE SURF, V23, P108
  • [3] MOLL E, 1984, Patent No. 4448802
  • [4] MOLL E, Patent No. 2823876
  • [5] REACTIVE HIGH-RATE SPUTTERING OF OXIDES
    MUNZ, WD
    HEIMBACH, J
    REINECK, SR
    [J]. THIN SOLID FILMS, 1981, 86 (2-3) : 175 - 181
  • [6] PAWLEWICZ WT, 1982, P SOC PHOTO-OPT INST, V325, P105, DOI 10.1117/12.933293
  • [7] PERRY AJ, 1985, THIN SOLID FILMS
  • [8] REFRACTIVE-INDEXES OF TIO2 FILMS PRODUCED BY REACTIVE EVAPORATION OF VARIOUS TITANIUM-OXYGEN PHASES
    PULKER, HK
    PAESOLD, G
    RITTER, E
    [J]. APPLIED OPTICS, 1976, 15 (12): : 2986 - 2991
  • [9] PULKER HK, 1984, COATING GLASS, pCH8