INTERFACE OBSERVATION USING MEDIUM ENERGY ION-SCATTERING WITH HIGH-ENERGY RESOLUTION

被引：12

作者：

KOSHIKAWA, T

KIKUCHI, R

TAKAGI, K

UCHIYAMA, T

MIHARA, Y

AGAWA, Y

MATSUURA, S

INUZUKA, E

SUZUKI, T

机构：

[1] ULVAC CORP,CHIGASAKI 253,JAPAN

[2] HAMAMATSU PHOTON KK,HAMAMATSU 430,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 33卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(88)90645-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：623 / 627

页数：5

共 15 条

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