PHASE FORMATION BY ION-BEAM MIXING IN NI/AL, PD/AL, AND PT/AL BILAYERS

被引:92
作者
NASTASI, M
HUNG, LS
MAYER, JW
机构
关键词
D O I
10.1063/1.94511
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:831 / 833
页数:3
相关论文
共 9 条
[1]  
[Anonymous], ION BEAM SURFACE LAY
[2]   KINETICS OF COMPOUND FORMATION IN THIN-FILM COUPLES OF AL AND TRANSITION-METALS [J].
HOWARD, JK ;
LEVER, RF ;
SMITH, PJ ;
HO, PS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01) :68-71
[3]   ION-INDUCED AMORPHOUS AND CRYSTALLINE PHASE FORMATION IN AL/NI, AL/PD, AND AL/PT THIN-FILMS [J].
HUNG, LS ;
NASTASI, M ;
GYULAI, J ;
MAYER, JW .
APPLIED PHYSICS LETTERS, 1983, 42 (08) :672-674
[4]   THERMAL-REACTIONS BETWEEN ALUMINUM AND PALLADIUM LAYERED FILMS [J].
KOSTER, U ;
HO, PS ;
RON, M .
THIN SOLID FILMS, 1980, 67 (01) :35-44
[5]  
MAYER JW, 1981, 2ND P INT C ION BEAM, P1
[6]   THIN-FILM INTERACTION IN ALUMINUM AND PLATINUM [J].
MURARKA, SP ;
BLECH, IA ;
LEVINSTEIN, HJ .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (12) :5175-5181
[7]  
TSAUR BY, 1980, P S THIN FILM INTERF, V80, P205
[8]  
Tu K. N., 1978, Thin films. Interdiffusion and reactions, P359
[9]  
WANG KL, 1980, P S THIN FILM INTERF, V80, P232