CHEMICALLY ENHANCED SELF-SPUTTERING OF CARBON

被引：13

作者：

DAVIS, JW

HAASZ, AA

机构：

[1] University of Toronto, Institute for Aerospace Studies, North York, Ont. M3H 5T6

来源：

APPLIED PHYSICS LETTERS | 1990年 / 57卷 / 19期

关键词：

D O I：

10.1063/1.103984

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

New results obtained for graphite self-sputtering, in the presence of thermal atomic hydrogen, show that chemically enhanced self-sputtering (CES) can exceed unity erosion yield even at normal angles of incidence. CES yields were found to depend on the φC+/φ H0 flux ratio and graphite temperature, with peak erosion occurring at about 800 K. No dependence on angles of incidence was observed.

引用

收藏

页码：1976 / 1977

页数：2

相关论文

共 7 条

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DAVIS, JW ;

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HAASZ, AA ;

DAVIS, JW ;

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[6] UNITY YIELD CONDITIONS FOR SPUTTERING OF GRAPHITE BY CARBON-IONS [J].

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JOURNAL OF NUCLEAR MATERIALS, 1989, 165 (03) :193-198

[7] HYDROCARBON FORMATION IN THE REACTION OF ATOMIC-HYDROGEN WITH PYROLYTIC-GRAPHITE AND THE SYNERGISTIC EFFECT OF ARGON ION-BOMBARDMENT [J].

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