PROPERTIES OF SUPERCONDUCTING YBA2CU3O7-DELTA THIN-FILMS MADE AT HIGH DEPOSITION RATES

被引：5

作者：

WU, XD ^{[1
]}

MUENCHAUSEN, RE ^{[1
]}

FOLTYN, SR ^{[1
]}

ESTLER, RC ^{[1
]}

NOGAR, NS ^{[1
]}

ROLLETT, AD ^{[1
]}

CHANG, CC ^{[1
]}

ENGLAND, P ^{[1
]}

RAMESH, R ^{[1
]}

HWANG, DM ^{[1
]}

RAVI, TS ^{[1
]}

机构：

[1] BELLCORE,RED BANK,NJ 07701

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1991年 / 27卷 / 02期

关键词：

D O I：

10.1109/20.133979

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

High T(c) and J(c) YBa2Cu3O7-delta thin films were prepared by pulsed laser deposition using deposition rates up to 145 angstrom/s. In this paper, it will be shown that the deposition rate is one of the important thin film processing parameters in addition to the substrate temperature and oxygen partial pressure, which control the film microstructure surface morphology and thereby the superconducting properties.

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页码：1445 / 1448

页数：4

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