ALIGNED, COEXISTING LIQUID AND SOLID REGIONS IN LASER-ANNEALED SI

被引：29

作者：

NEMANICH, RJ

BIEGELSEN, DK

HAWKINS, WG

机构：

来源：

PHYSICAL REVIEW B | 1983年 / 27卷 / 12期

关键词：

D O I：

10.1103/PhysRevB.27.7817

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：7817 / 7819

页数：3

共 10 条

[1]

BIEGELSEN DK, 1980, LASER ELECTRON BEAM, P569

[2] LASER-INDUCED MELT DYNAMICS OF SI AND SILICA [J].

BOSCH, MA ;

LEMONS, RA .

PHYSICAL REVIEW LETTERS, 1981, 47 (16) :1151-1155

[3] SURFACE RIPPLES ON SILICON AND GALLIUM-ARSENIDE UNDER PICOSECOND LASER ILLUMINATION [J].

FAUCHET, PM ;

SIEGMAN, AE .

APPLIED PHYSICS LETTERS, 1982, 40 (09) :824-826

[4] GROWTH OF SPONTANEOUS PERIODIC SURFACE-STRUCTURES ON SOLIDS DURING LASER ILLUMINATION [J].

GUOSHENG, Z ;

FAUCHET, PM ;

SIEGMAN, AE .

PHYSICAL REVIEW B, 1982, 26 (10) :5366-5381

[5] SURFACE-TOPOGRAPHY OF LASER ANNEALED SILICON [J].

HANEMAN, D ;

NEMANICH, RJ .

SOLID STATE COMMUNICATIONS, 1982, 43 (03) :203-206

[6]

HAWKINS WG, 1983, APPL PHYS LETT, V42, P105

[7] PERIODIC SURFACE-STRUCTURES FROZEN INTO CO2 LASER-MELTED QUARTZ [J].

KEILMANN, F ;

BAI, YH .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 29 (01) :9-18

[8] PERIODIC REGROWTH PHENOMENA PRODUCED BY LASER ANNEALING OF ION-IMPLANTED SILICON [J].

LEAMY, HJ ;

ROZGONYI, GA ;

SHENG, TT ;

CELLER, GK .

APPLIED PHYSICS LETTERS, 1978, 32 (09) :535-537

[9] EXPERIMENTAL TESTS FOR BOSON CONDENSATION AND SUPERCONDUCTIVITY IN SEMICONDUCTORS DURING PULSED-BEAM ANNEALING [J].

VANVECHTEN, JA .

SOLID STATE COMMUNICATIONS, 1981, 39 (12) :1285-1291

[10] LASER-INDUCED PERIODIC SURFACE DAMAGE AND RADIATION REMNANTS [J].

YOUNG, JF ;

SIPE, JE ;

PRESTON, JS ;

VANDRIEL, HM .

APPLIED PHYSICS LETTERS, 1982, 41 (03) :261-264

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